Silicon doped by molecular doping technique: Role of the...

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Materials Science in Semiconductor Processing 2015 / 8

Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics

Caccamo, Sebastiano, Puglisi, Rosaria A., Di Franco, Salvatore, D’Urso, Luisa, Indelicato, Valeria, Italia, Markus, Pannitteri, Salvatore, La Magna, Antonino
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Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.08.017
Date:
August, 2015
File:
PDF, 1.04 MB
english, 2015
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