[IEEE International Semiconductor Device Research Symposium, 2003 - Washington, DC, USA (Dec. 10-12, 2003)] International Semiconductor Device Research Symposium, 2003 - Heteroepitaxial growth of GaN, AlN, and AlGaN layers on sic substrates by HVPE
Melnik, Yu., Kovalenkov, O., Soukhoveev, V., Ivantsov, V., Shapovalova, Y., Usikov, A., Dmitriev, V.Year:
2003
Language:
english
DOI:
10.1109/ISDRS.2003.1272119
File:
PDF, 82 KB
english, 2003