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[IEEE International Semiconductor Device Research Symposium, 2003 - Washington, DC, USA (Dec. 10-12, 2003)] International Semiconductor Device Research Symposium, 2003 - Heteroepitaxial growth of GaN, AlN, and AlGaN layers on sic substrates by HVPE

Melnik, Yu., Kovalenkov, O., Soukhoveev, V., Ivantsov, V., Shapovalova, Y., Usikov, A., Dmitriev, V.
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Year:
2003
Language:
english
DOI:
10.1109/ISDRS.2003.1272119
File:
PDF, 82 KB
english, 2003
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