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Ultra precision positioning system for servo motor–piezo actuator using the dual servo loop and digital filter implementation
Heui Jae Pahk, Dong Sung Lee, Jong Ho ParkVolume:
41
Year:
2001
Language:
english
Pages:
13
DOI:
10.1016/s0890-6955(00)00061-4
File:
PDF, 265 KB
english, 2001