The robust detection and removal of unwanted asperities in...

The robust detection and removal of unwanted asperities in applied surface metrology

Mark C. Malburg, Derek G. Chetwynd, Jayaraman Raja
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Volume:
38
Year:
1998
Language:
english
Pages:
11
DOI:
10.1016/s0890-6955(97)00064-3
File:
PDF, 237 KB
english, 1998
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