Surface roughness of (110) orientation silicon based micro...

Surface roughness of (110) orientation silicon based micro heat exchanger channel

Shung-Wen Kang, Jong-Shun Chen, Jong-Yun Hung
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Volume:
38
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0890-6955(97)00115-6
File:
PDF, 359 KB
english, 1998
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