Direct length comparison between regular crystalline...

International Journal of Machine Tools and Manufacture 1998 Vol. 38; Iss. 5-6

Direct length comparison between regular crystalline lattice and SEM standard grating using dual tunneling unit STM

Masato Aketagawa, Koji Takada, Shigetoshi Sasaki, Seiki Suzuki, Keiko Kobayashi, Kazutoshi Yamada, Yoshinori Nakayama
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Volume:
38
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0890-6955(97)00117-x
File:
PDF, 630 KB
english, 1998
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