Useful Database of Effective Gettering Sites for Metal...

ECS Journal of Solid State Science and Technology 2015 Vol. 4; Iss. 9

Useful Database of Effective Gettering Sites for Metal Impurities in Si Wafers with First Principles Calculation

Shirasawa, Sho, Sueoka, Koji, Yamaguchi, Tadashi, Maekawa, Kazuyoshi
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Volume:
4
Year:
2015
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0051509jss
File:
PDF, 471 KB
english, 2015
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