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SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Comprehensive review of micro/meso-scale machine tools
Wang, Q. Y., Fang, F. Z., Hu, X. T., Han, Sen, Xing, Tingwen, Li, Yanqiu, Cui, ZhengVolume:
6724
Year:
2007
Language:
english
DOI:
10.1117/12.782899
File:
PDF, 335 KB
english, 2007