Crystal Structure and Optical Properties of Al-Doped ZnO Large-Area Thin Films Using 1500 mm Dual Cylindrical Cathodes
Lee, JinJu, Ha, Jong-Yoon, Yim, Haena, Choi, Won-Kook, Choi, Ji-WonVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.11454
Date:
November, 2015
File:
PDF, 311 KB
english, 2015