![](/img/cover-not-exists.png)
[IEEE 2015 10th Asian Control Conference (ASCC) - Kota Kinabalu, Malaysia (2015.5.31-2015.6.3)] 2015 10th Asian Control Conference (ASCC) - Force optimization of a linear motion type electrostatic microactuator using finite element method (FEM) analysis for high thrust performances
Mariam, Md Ghazaly, Khang, Lim Tzi, Aliza, Che Amran, Kaiji, SatoYear:
2015
Language:
english
DOI:
10.1109/ASCC.2015.7244870
File:
PDF, 2.70 MB
english, 2015