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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations
Mrcarica, Zeljko, Risojevic, Vladimir, Lenczner, Michel, Jakovljevic, Mirko, Litovski, Vanco, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, KareVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341214
File:
PDF, 2.39 MB
english, 1999