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SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Integrated Optical Devices: Fabrication and Testing - SiON technology for integrated optical sensors
Lambeck, Paul V., Worhoff, Kerstin, Righini, Giancarlo C.Volume:
4944
Year:
2003
Language:
english
DOI:
10.1117/12.473582
File:
PDF, 139 KB
english, 2003