Symmetric Multicycle Rapid Thermal Annealing: Enhanced Activation of Implanted Dopants in GaN
Greenlee, Jordan D., Feigelson, Boris N., Anderson, Travis J., Hite, Jennifer K., Hobart, Karl D., Kub, Francis J.Volume:
4
Year:
2015
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0191509jss
File:
PDF, 791 KB
english, 2015