Static Behavior of Closed-Loop Micromachined Levitated Two-Axis Rate Gyroscope
Poletkin, Kirill, Wallrabe, UlrikeVolume:
15
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2015.2469715
Date:
December, 2015
File:
PDF, 1.45 MB
english, 2015