SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] EUV, X-Ray, and Neutron Optics and Sources - Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography
Bajt, Sasa, Behymer, Ricke D., Mirkarimi, Paul B., Montcalm, Claude, Wall, Mark A., Wedowski, Marco, Folta, James A., MacDonald, Carolyn A., Goldberg, Kenneth A., Maldonado, Juan R., Chen-Mayer, HuaiyVolume:
3767
Year:
1999
Language:
english
DOI:
10.1117/12.371125
File:
PDF, 809 KB
english, 1999