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SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Precision machining of innovative materials using 157-nm excimer laser radiation
Ostendorf, Andreas, Stamm, Uwe, Temme, Thorsten, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456905
File:
PDF, 333 KB
english, 2002