SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Characterization of MEMS by feedback interferometry
Annovazzi-Lodi, Valerio, Merlo, Sabina, Norgia, Michele, Spinola, Guido, Vigna, Benedetto, Zerbini, Sarah, Courtois, Bernard, Karam, Jean Michel, Markus, Karen W., Michel, Bernd, Mukherjee, Tamal, WalVolume:
4755
Year:
2002
Language:
english
DOI:
10.1117/12.462839
File:
PDF, 693 KB
english, 2002