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SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Nanophotonics, Nanostructure, and Nanometrology - A new method for measuring a small displacement by using the critical angle method and confocal technology
Liao, Shu-Jen, Wang, Shinn-Fwu, Chiu, Ming-Hung, Zhu, Xing, Chou, Stephen Y., Arakawa, YasuhikoVolume:
5635
Year:
2005
Language:
english
DOI:
10.1117/12.572739
File:
PDF, 136 KB
english, 2005