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SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Resolution enhancement techniques for contact hole printing of sub-50nm memory device
Shin, Hye-Jin, You, Tae-jun, Yoo, Min-Ae, Choi, Jin-Young, Yang, Kiho, Park, Chan-Ha, Yim, Dong-gyu, Chen, Alek C., Lin, Burn, Yen, AnthonyVolume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804646
File:
PDF, 714 KB
english, 2008