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Non-silicon MEMS platforms for gas sensors
Vasiliev, A.A., Pisliakov, A.V., Sokolov, A.V., Samotaev, N.N., Soloviev, S.A., Oblov, K., Guarnieri, V., Lorenzelli, L., Brunelli, J., Maglione, A., Lipilin, A.S., Mozalev, A., Legin, A.V.Volume:
224
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2015.10.066
Date:
March, 2016
File:
PDF, 3.47 MB
english, 2016