Fabrication and characterisation of field-effect transistor-type pressure sensor with metal–oxide–semiconductor/microelectromechanical systems processes
Kim, Byung-Min, Kim, Bum-Joon, Kim, Jung-SikVolume:
10
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2015.0166
Date:
October, 2015
File:
PDF, 307 KB
english, 2015