Performance of a hybrid vacuum pump at low temperature
J.P Périn, D Chatain, J Manzagol, J.J Cordier, P Garin, F SamailleVolume:
51-52
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0920-3796(00)00331-8
File:
PDF, 110 KB
english, 2000