Performance of colloidal silica and ceria based slurries on...

Applied Surface Science 2015 / 12 Vol. 359

Performance of colloidal silica and ceria based slurries on CMP of Si-face 6H-SiC substrates

Chen, Guomei, Ni, Zifeng, Xu, Laijun, Li, Qingzhong, Zhao, Yongwu
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Volume:
359
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.10.158
Date:
December, 2015
File:
PDF, 932 KB
english, 2015
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