SPIE Proceedings [SPIE Fundamentals of Laser Assisted Micro- and Nanotechnologies 2013 - St. Petersburg, Russian Federation (Monday 24 June 2013)] Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013 - Destruction of monocrystalline silicon with nanosecond pulsed fiber laser accompanied by the oxidation of ablation microparticles

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