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Construction of a manipulator with six degrees of freedom and a rotary platform differentially pumped via retractable welded bellows
Yuh, Jih-Young, Cheng, Cheng-MawVolume:
121
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2014.12.008
Date:
November, 2015
File:
PDF, 2.29 MB
english, 2015