SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Fabrication of micro-holes in silica glass by femtosecond laser pulses
Iga, Y., Watanabe, Wataru, Ishizuka, T., Li, Yan, Nishii, Junji, Itoh, Kazuyoshi, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.541076
File:
PDF, 252 KB
english, 2003