Efficient Wet Etching of GaN (0001) Substrate with...

Journal of Nanoscience and Nanotechnology 2011 / 04 Vol. 11; Iss. 4

Efficient Wet Etching of GaN (0001) Substrate with Subsurface Damage Layer

Sadakuni, Shun, Murata, Junji, Yagi, Keita, Sano, Yasuhisa, Okamoto, Takeshi, Kenta, Arima, Hattori, Azusa N., Yamauchi, Kazuto
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.3897
Date:
April, 2011
File:
PDF, 2.92 MB
english, 2011
Conversion to is in progress
Conversion to is failed