Thermal Fields Simulation of the Refining Process for Si...

Thermal Fields Simulation of the Refining Process for Si Wafer by Continuous-Wave Laser Irradiation

Fan, Bao Dian, Chen, Rong, Pang, Ai Suo, Chen, Chao
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Volume:
833
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.833.117
Date:
November, 2015
File:
PDF, 890 KB
english, 2015
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