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SPIE Proceedings [SPIE AeroSense '97 - Orlando, FL (Monday 21 April 1997)] Navigation and Control Technologies for Unmanned Systems II - Finite element modeling and simulation on a novel microstructure silicon accelerometer with direct frequency output
Fan, Shangchun, Liu, Guangyu, Lee, Man Hyung, Speigle, Scott A.Volume:
3087
Year:
1997
Language:
english
DOI:
10.1117/12.277220
File:
PDF, 606 KB
english, 1997