Impact of the firing step on Al 2...

Impact of the firing step on Al 2 O 3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches

Pawlik, Matthieu, Vilcot, Jean-Pierre, Halbwax, Mathieu, Gauthier, Michel, Le Quang, Nam
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.08KD21
Date:
August, 2015
File:
PDF, 3.42 MB
english, 2015
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