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SPIE Proceedings [SPIE International Symposium on Optomechatronic Technologies - Lausanne, Switzerland (Monday 8 October 2007)] Optomechatronic Actuators and Manipulation III - Optical beam steering using a 2D MEMS scanner

Pétremand, Yves, Clerc, Pierre-André, Epitaux, Marc, Hauffe, Ralf, Noell, Wilfried, de Rooij, N. F., Bellouard, Yves, Otani, Yukitoshi, Moon, Kee S.
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Volume:
6715
Year:
2007
Language:
english
DOI:
10.1117/12.754170
File:
PDF, 1.78 MB
english, 2007
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