![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 27 February 2011)] Alternative Lithographic Technologies III - Wafer-level fabrication of distributed feedback laser diodes by utilizing UV nanoimprint lithography
Yanagisawa, Masaki, Tsuji, Yukihiro, Yoshinaga, Hiroyuki, Kouno, Naoya, Hiratsuka, Kenji, Herr, Daniel J. C.Volume:
7970
Year:
2011
Language:
english
DOI:
10.1117/12.879367
File:
PDF, 411 KB
english, 2011