Long-term and Annealing Stable, Solderable PVD Metallization with Optimized Al Diffusion Barrier
Kumm, Julia, Chacko, Rony V., Samadi, Hassan, Hartmann, Philip, Eberlein, Dirk, Wolf, AndreasVolume:
77
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2015.07.052
Date:
August, 2015
File:
PDF, 493 KB
english, 2015