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SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Optical Fabrication, Testing, and Metrology IV - Two-dimensional thickness measurement of a dielectric thin layer on a metal by use of surface-plasmon-resonance-based ellipsometry
Iwata, Tetsuo, Wada, Yusuke, Nishigaki, Kentaro, Mizutani, Yasuhiro, Duparré, Angela, Geyl, RolandVolume:
8169
Year:
2011
Language:
english
DOI:
10.1117/12.896767
File:
PDF, 1.99 MB
english, 2011