Atomic Layer Deposition of Aluminum Oxide Films for Carbon...

Journal of Nanoscience and Nanotechnology 2011 / 10 Vol. 11; Iss. 10

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Grigoras, Kestutis, Zavodchikova, Marina Y., Nasibulin, Albert G., Kauppinen, Esko I., Ermolov, Vladimir, Franssila, Sami
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Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.3471
Date:
October, 2011
File:
PDF, 3.69 MB
english, 2011
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