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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors
Wang, P., Majerus, S.J.A., Karam, R., Hanzlicek, B., Lin, D.L., Zhu, H., Anderson, J.M., Damaser, M.S., Zorman, C.A., Ko, W.H.Year:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7180966
File:
PDF, 971 KB
english, 2015