Hydrogen-enhanced clusterization of intrinsic defects and...

Physica B: Condensed Matter 2001 Vol. 302-303; Iss. none

Hydrogen-enhanced clusterization of intrinsic defects and impurities in silicon

B.N Mukashev, Kh.A Abdullin, Yu.V Gorelkinskii, M.F Tamendarov, S.Zh Tokmoldin
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Volume:
302-303
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0921-4526(01)00437-9
File:
PDF, 160 KB
english, 2001
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