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Defects agglomeration in the vicinity of hydrogen-related vacancy-type complexes in proton-implanted silicon
S.Zh. Tokmoldin, B.N. MukashevVolume:
308-310
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(01)00681-0
File:
PDF, 155 KB
english, 2001