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Investigation of Chemical/Mechanical Polishing of Niobium
Calota, George, Maximova, Natalia, Ziemer, Katherine S., Müftü, SinanVolume:
52
Language:
english
Journal:
Tribology Transactions
DOI:
10.1080/10402000802687924
Date:
June, 2009
File:
PDF, 993 KB
english, 2009