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Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching
Gao, Bo, Chen, Tao, Chen, Ying, Si, Jin-Hai, Hou, XunVolume:
32
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/32/10/107901
Date:
October, 2015
File:
PDF, 827 KB
english, 2015