SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared
Piyawattanametha, Wibool, Park, Yong-Hwa, Rissanen, A., Mannila, R., Tuohiniemi, M., Akujärvi, A., Antila, J.Volume:
8977
Year:
2014
Language:
english
DOI:
10.1117/12.2035732
File:
PDF, 537 KB
english, 2014