AlN thin films grown by ion-beam-enhanced deposition and its application to SOI materials
Chuanling Men, Zheng Xu, Zhenghua An, Xinyun Xie, Miao Zhang, Chenglu LinVolume:
324
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0921-4526(02)01318-2
File:
PDF, 339 KB
english, 2002