Characterization of high rate a-SiGe:H thin films...

Characterization of high rate a-SiGe:H thin films fabricated by 55 kHz PECVD

Boris G Budaguan, Alexei A Sherchenkov, Grigory L Gorbulin, Vladimir D Chernomordic
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Volume:
325
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0921-4526(02)01692-7
File:
PDF, 174 KB
english, 2003
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