SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Micro- and Nanometrology V - Interferometric sensors based on sinusoidal optical path length modulation
Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Knell, Holger, Schake, Markus, Schulz, Markus, Lehmann, PeterVolume:
9132
Year:
2014
Language:
english
DOI:
10.1117/12.2051508
File:
PDF, 657 KB
english, 2014