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SPIE Proceedings [SPIE Optomechatronic Technologies 2005 - Sapporo, Japan (Monday 5 December 2005)] Optomechatronic Micro/Nano Devices and Components - Low temperature bonding of LiNbO3 waveguide chips to Si substrates in air
Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Shinada, Satoshi, Kawanishi, Tetsuya, Katagiri, YoshitadaVolume:
6050
Year:
2005
Language:
english
DOI:
10.1117/12.653072
File:
PDF, 333 KB
english, 2005