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Effect of nitrogen content on the microstructure and mechanical properties of CNx thin films
N.Alba de Sánchez, C. Carrasco, P. PrietoVolume:
337
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0921-4526(03)00423-x
File:
PDF, 702 KB
english, 2003