Rheological Characterization of MR Polishing Fluid Used for Silicon Polishing in BEMRF Process
Saraswathamma, K., Jha, Sunil, Rao, P. VenkateswaraVolume:
30
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426914.2014.994767
Date:
May, 2015
File:
PDF, 1.17 MB
english, 2015