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Measurement of Surface Adhesion Force of Adhesion Promoter and Release Layer for UV-Nanoimprint Lithography
Choi, Dae-Geun, Lee, Dong-Il, Kim, Ki-Don, Jeong, Jun-Ho, Choi, Jun-Hyuk, Lee, Eung-SugVolume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.C021
Date:
February, 2009
File:
PDF, 1.64 MB
english, 2009