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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Microvalve for SMA-based CHAD
Lee, Dong Gun, Chen, Quanfang, Shin, Daniel D., Carman, Gregory P., Varadan, Vijay K., Kish, Laszlo B.Volume:
5055
Year:
2003
Language:
english
DOI:
10.1117/12.483593
File:
PDF, 415 KB
english, 2003