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Study of Stresses in Thin Silicon Wafers with Near-infraredphase Stepping Photoelasticity
Zheng, Tieyu, Danyluk, StevenVolume:
17
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2002.0008
Date:
January, 2002
File:
PDF, 1.18 MB
english, 2002